发明名称
摘要 PURPOSE:To detect the position of the prescribed pattern with high precision at a high speed by a method wherein the position of the pattern detected from two dimentional picture informations obtained from the output signal of an image pickup means is displayed on a picture display means by the prescribed mark. CONSTITUTION:A video signal sent from a television control part is inputted to addition blocks X, Y in the X, Y directions through a video amplifier 31, an A/D converter 32 and a latch circuit 33. The inputted signals are added respectively by adders 38, 34 to be latched in latch circuits 39, 35, and added data are planted in memories 40, 36. When addition of the frames of the prescribed number is completed, a microprocessor accesses to the memories 40, 36, and the position of a television prealignment mark is detected from added data to be displayed on a display means.
申请公布号 JPS6354213(B2) 申请公布日期 1988.10.27
申请号 JP19820210922 申请日期 1982.11.30
申请人 CANON KK 发明人 AYADA NAOKI;YAMADA YASUMI
分类号 A61K39/00;G01B11/00;G03F9/00;G05D3/12;H01L21/027;H01L21/30;H01L21/68 主分类号 A61K39/00
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