| 摘要 |
PURPOSE:To increase permeability, to increase mechanical strength and to improve abrasion resistance, by including 4-12% Si, 6-18% Ga and 0.01-2% C in a weight ratio in an alloy composition, with Fe for a remaining part. CONSTITUTION:An alloy composition includes 4-12% Si, 6-18% Ga and 0.01-2% C in weight ratio, with Fe for a remaining part. When C is added, permeability, mechanical strength and abrasion resistance can be largely improved. The permeabilities are increased in the range of 7-10% for the amount of Si and in the range of 10-16% for the amount of Ga. Therefore these ranges of the composition are desirable. When the adding amount of C is less than 0.01% the effect is not clear. When the C is added so as to exceed 2%, remarkable improvement in mechanical strength and abrasion resistance are not recognized. Meanwhile permeability is decreased. The manufacturing method of a soft magnetic thin film can be selected arbitrarily among various sputtering methods, evaporating methods and plating methods. In this way, the thin film characterized by excellent mechanical strength and abrasion resistance and high permeability as the material for the soft magnetic thin film is obtained.
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