Integrated semiconductor circuit arrangement having a superconducting layer, and method for producing it

摘要

A description is given of a technology for using superconducting material (4) as conductor in integrated semiconductor circuit arrangements. An insulator layer (film) (3) and/or a barrier (depletion) layer (7) are provided for the purpose of preventing the diffusion of harmful constituents of the superconducting material (4) into the semiconductor arrangement. The control of a circuit can be performed by utilising the properties of the superconducting material (4). The properties of the superconducting material (4) can be adjusted likewise. Also described is a method for forming a superconducting material layer, which is compatible over a wide field with the conventional method for producing integrated circuit arrangements.