| 摘要 |
PURPOSE:To obtain a stable video signal even over a wide range of temperature region, by providing this device with the following parts: a transparent resin film which is formed on a surface including photoelectric conversion elements, end a shading film which is formed on this transparent resin film so as to shade plural rows of the photoelectric conversion elements. CONSTITUTION:Transfer gate regions 6 are formed between adjacent photodiodes 1 and vertical CCD registers 2. Transfer electrodes 8 are formed through a silicon oxide film 7 respectively on the transfer gate regions 6 and the vertical CCD registers 2, and further an Al layer 9 is formed thereon in an array shape so as to shade respective rows of the transfer gate regions 6 and the vertical CCD registers 2 through the silicon oxide film 7. An insulating film 10 is formed as a protective film over the whole surface including the Al layer 9, and a transparent resin film 11 is formed over the whole surface of the insulating film 10. Arrays of photodiodes 1 are shaded on the transparent resin film 11 to form an optical black. A difference of a dark current hence disappears over a wide range of temperature region and so a stable video signal can be obtained. |
