| 摘要 |
A transducer structure which may be used to transduce all manner of chemical and physical phenomena of a chemical environment. In this structure, the transducer means (146) and the active electronics (148) (140) are formed on discrete regions of the same surface of an inert substrate (130) and are interconnected by a connetor means (150). A wall (182) separates the active electronics (148) (140) from the transducer means (146) so as to protect the active electronics (148) (140) from the environment to which the transducer (146) is exposed. Advantageously, the active electronics (148) (140) are in a semiconductor material which is formed epitaxially on the substrate (130) to provide a monolithic structure; and the transducer (146), the active electronics (148) (140) and the connector means (150) are formed by conventional photolithographic techniques. |
