发明名称 AIRTIGHT SEAL TESTER
摘要 PURPOSE:To enable the shortening of test time or automatic of the test, by performing a test with a test box having a number of laboratory chambers formed as unit. CONSTITUTION:A test object A into which a gas for detection is forcibly sealed beforehand is housed into a test chamber 7 formed in a body 4 of a test box 1. The box 1 is inserted into a support frame 2 through a conveying path 9 and when an opening 8 of each of the test chambers 7 aligns an exhaust port 10 on the bottom surface of the box 1 to communicate with each other, an exhaust analysis means is driven. Such exhaustion is performed by opening only one of a plurality of valves 11 while the others are shut off. The operation is made so as to attain a fixed vacuum and any leakage of a gas is detected by the exhaust analysis means to identify a test object A incompletely sealed. On the other hand, from the detection of no gas, complete sealing is judged. Upon the end of inspecting one test object A, a valve of the test chamber 7 is shut out automatically and then, a tests are executed sequentially.
申请公布号 JPS63259429(A) 申请公布日期 1988.10.26
申请号 JP19870093597 申请日期 1987.04.16
申请人 SUMITOMO ELECTRIC IND LTD 发明人 FUJIHIRA MITSUAKI;NISHIGUCHI KATSUNORI
分类号 H01L23/02;G01M3/20 主分类号 H01L23/02
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