| 摘要 |
PURPOSE:To permit temp. control by heating of a vapor flow control wall surface by adopting conductive ceramics for the material of the vapor flow control wall surface. CONSTITUTION:A ferromagnetic material 3 is heated to evaporate in a vapor source 2. This material 3 is discriminated to two kinds; the particles colliding against the vapor flow control wall surface 11 installed to improve vapor deposition efficiency and the particles scattering from the upper aperture of this wall surface 11. The particles colliding against the wall surface 11 deposit by vapor deposition on the wall surface and disturb the vapor flow of the material 3 when the temp. of the wall surface 11 is not kept above the m.p. of the material 3. Since the conductive ceramics is adopted for the material of this wall surface 11, such a thing as formation of holes does not arise even if the high-temp. particles of the material 3 stick to the wall surface 11; in addition, heating of the wall surface by electrical heating or high-frequency induction heating is possible, i.e., the temp. control of the wall surface 11 is possible. The conductive ceramics (ZrB, TiN or the like) is hardly reactive with the material 3 and the durability and corrosion resistance of the wall surface 11 are improved.
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