PRODUCTION OF DIAMONDLIKE CARBON

摘要

PURPOSE:To efficiently produce diamondlike carbon at a high rate of deposition by bringing gas obtd. by exciting gas from an org. compd. contg. oxygen or nitrogen as a carbon source into contact with a heated substrate under reduced pressure. CONSTITUTION:Gas from an org. compd. contg. oxygen and/or an org. compd. contg. nitrogen as a carbon source or a mixture of the gas with gaseous hydrogen and/or an inert gas is excited by plasma CVD or other method. The resulting gas is brought into contact with a substrate kept at <=600 deg.C, preferably room temp. - about 400 deg.C under reduced pressure of 10<-9>-10<2>Torr to deposit and form diamondlike carbon on the substrate at a high rate of deposition. Satd. monohydric alcohol, aldehyde or ketone may be used as the org. compd. contg. oxygen and aliphat. nitrile, amine or amide as the org. compd. contg. nitrogen.