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发明名称
ANORDNUNG ZUR INTERFEROMETRISCHEN EBENHEITSPRUEFUNG TECHNISCHER OBERFLAECHEN
摘要
申请公布号
DD261422(A1)
申请公布日期
1988.10.26
申请号
DD19870303196
申请日期
1987.05.27
申请人
AKADEMIE DER WISSENSCHAFTEN DER DDR,DD
发明人
ELSSNER,KARL-EDMUND,DD;GRZANNA,JUERGEN,DD;SCHWIDER,JOHANNES,DD;SPOLACZYK,REINER,DD
分类号
G01B9/02;(IPC1-7):G01B9/02
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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