| 摘要 |
PURPOSE:To improve the characteristic and productivity of a recording medium by the constitution consisting in laminating a thin film on a substrate while rotating and revolving the substrate. CONSTITUTION:The transparent substrate 4 is rotated and revolved by a gap 6 when the substrate 4 is pinched by a holding plate 2 and a retainer 3, is set on a tray 1 and is rotated. An aluminum silicon nitride film and NdDyFeCoTi film are then laminated on the substrate by vacuum deposition. Fluctuation in compsn. distribution is eliminated by the rotation and revolution of the substrate 4 in such a manner by which the characteristics and productivity of the recording medium are improved at low cost.
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