| 摘要 |
PURPOSE:To achieve a higher measuring accuracy, by accomplishing the supporting of a sample and the zoning of an airtight chamber with the pressing of a thin rim part on the sample. CONSTITUTION:A sample supporting member 6 is a thin cylindrical member molded from soft silicon and has a cylindrical circumference 6a, a diaphragm 6b protruding inward from the central inner wall thereof and a sample support hole 6c at the center of the diaphragm. When the circumference 6a of the sample support member 6 is sucked vacuum from a sucking chamber 7e, the center of the circumference 6a corresponding to the diaphragm 6b is drawn into the sucking chamber 7e to the diameter of the sample support hole 6c to about 12mm. Here, a sample 9 can be inserted from above. When the pressure in the sucking chamber 7e is brought to atm. by stopping the vacuum suction, the circumference 6a of the sample support member 6 is returned to the original position and the rim part of the diaphragm 6a is bent slightly to be pressed on the circumferential surface of the sample 9. Thus, the sample 9 is held while airtight chambers 1a-1c are closed.
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