| 摘要 |
PURPOSE:To obtain a levitating non-contact guide device with a simple mechanism, by arranging a levitating section for generating a counter-directional repulsion, and a guide section opposed 10 the levitating section, and by eliminating a levitating force which is forcibly shifted in the upper and horizontal directions. CONSTITUTION:So far as a levitating section 2 is concerned, levitating yokes 4a, 4b are connected to both the ends of a magnet 3. On the side of a guide section 5 opposed to the section 2, guide yokes 5a, 5b are arranged. On the guide yokes 5a, 5b, magnets 7a, 7b are fitted to have the same magnetic poles as those of the levitating yokes 4a, 4b. The magnetic force of the magnet 3 generated from the levitating yokes 4a, 4b, and the magnetic force of the magnets 7a, 7b generated from the guide yokes 5a, 5b are repulsed to each other, and so repulsions as shown in arrow heads D1-D6 are worked on the side of a moving table 1. As a result, a stable guide with a simple mechanism can be performed.
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