发明名称 |
PNICTIDE TRAP FOR VACUUM SYSTEMS |
摘要 |
<p>A fore line trap is located before the forepump in a vacuum system. The trap utilizes a cracker, which may be a heated filament or a plasma, and cold walls. The cracker cracks pnictide gas species such as P4 into other species such as P2 which have a higher sticking co-efficient. The pnictides are deposited on the cold walls. The cold walls preferably comprise a sleeve which may be removed from the trap and replaced by a clean one.</p> |
申请公布号 |
CA1243472(A) |
申请公布日期 |
1988.10.25 |
申请号 |
CA19840457711 |
申请日期 |
1984.06.28 |
申请人 |
STAUFFER CHEMICAL COMPANY |
发明人 |
PARRY, ROBERT W.;BAUMANN, JOHN A.;SCHACHTER, ROZALIE |
分类号 |
B01D8/00;F04B37/16;(IPC1-7):F01N3/10 |
主分类号 |
B01D8/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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