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发明名称
摘要
申请公布号
JPS6353710(B2)
申请公布日期
1988.10.25
申请号
JP19810061702
申请日期
1981.04.23
申请人
FUJITSU LTD
发明人
MIMURA TAKASHI;HYAMIZU SUKEHISA
分类号
H01L21/331;H01L21/338;H01L29/06;H01L29/73;H01L29/778;H01L29/80;H01L29/812
主分类号
H01L21/331
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