| 摘要 |
PURPOSE:To accurately detect a position even if a capillary falling velocity is fast or it is vibrated by providing detecting means for detecting the contact of a pressure contactor by the comparison result of the control current of a motor with a discriminated value, and calculating means for calculating the height of a bonding face on the basis of its detection signal. CONSTITUTION:Detecting means 34 for comparing a control current VI of a motor 30 for driving a pressure contactor input with a preset discriminated value to output a detection signal OT representing the contact of the contactor with the bonding face on the basis of the comparison result, and calculating means 35 for calculating the height of the bonding face on the basis of the signal OT output from the means 34 are provided. For example, when a capillary is contacted with the bonding face, the voltage value of the feedback signal VI of the motor 30 is abruptly increased, and the comparator 34 outputs the signal OT to a controller 35. The controller 35 reads out an output signal PC from a counter 37 simultaneously upon inputting of the signal OT, and calculates the bonding face position, i.e., the height at this time on the basis of the number of pulses represented by the output signal PC. |
