| 摘要 |
PURPOSE:To make a shift amount of a bonding tool definite by detecting and controlling a position and the shift amount of the bonding tool when a wire comes into contact with an electrode. CONSTITUTION:While a shifting system 4 is shifted, the tip of a wire 11 held by a bonding tool 10 is brought into contact with an external terminal 12. By this operation, an arm support material 6 is turned; contacts 15A, 15B are separated; a position detector 15 is actuated. A detection signal of the position detector 15 is output to a control system; a first position of a shifting arm 7A is detected by using a shift-amount detection system 7. Then, the control stops a shifting operation of the shifting system 4 and actuates an ultrasonic generator 8; the wire 11 is pressed by the weight of the bonding tool 10 itself and is pressure-bonded. |
