发明名称 MANUFACTURE OF THIN FILM SUPERCONDUCTOR
摘要 PURPOSE:To obtain the high precision by sticking a specific composite compound film on a substrate and heat-treating this film. CONSTITUTION:A ternary composite compound film 12 which is an oxide containing at least A, B, Cu and has elements with the mol ratio expressed by the equation I is stuck on the surface of a substrate 11. That is, the composite compound film 12 is stuck on the heated substrate 11 by the deposition process, for example, and heat-treated in the oxidizing atmosphere to obtain this type of the superconductor. In the equation I, A indicates at least one kind of Sc, Y, and the lanthanum elements (atomic number 57-71), and B indicates at least one kind of IIa group elements such as Ba, Sr, Ca, Be, Mg. A superconductor with the high precision can be obtained accordingly.
申请公布号 JPS63257127(A) 申请公布日期 1988.10.25
申请号 JP19870090271 申请日期 1987.04.13
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 SETSUNE KENTARO;WASA KIYOTAKA;ADACHI HIDEAKI;MITSUYU TSUNEO;HATTA SHINICHIRO
分类号 H01L39/12;C01G1/00;C01G3/00;C23C14/08;C30B29/22;H01B12/06;H01B13/00 主分类号 H01L39/12
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