| 摘要 |
PURPOSE:To manufacture a good-quality thin film productively by arranging targets face to face and forming the thin film made of a superconductive material on a substrate by spattering. CONSTITUTION:Targets 2, 3 are arranged face to face and spattered to form a thin film made of a superconductive material on a substrate 30. Since the targets 2, 3 do not face the substrate 30, shocks by gamma-electrons and recoil argon are not applied to the substrate. The substrate is not damaged, and such a problem that the composition of the formed thin film is deviated from the preset composition does not occur. A thin film with the preset composition ratio can be formed stably, and a thin film excellent in the superconductive characteristic can be formed. Thin films can be formed on multiple substrates 30 with one spattering, and many thin films with the uniform thickness can be manufactured.
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