| 摘要 |
PURPOSE:To smooth the side faces of a light reflecting groove by executing projection and scanning of a laser beam continuously under continuous oscillation of the laser beam at the spot diameter of the laser beam adjusted large than the width of an aperture. CONSTITUTION:A laser light reflecting film 11 having the aperture 12 opened in the part to be formed with the light reflecting groove 13 is formed on an optical substrate 10 and the surface of the optical substrate 10 exposed in the aperture 12 is immersed in an etching soln. having thermal reactivity with the optical substrate 10. The spot of the continuous laser beam having the diameter larger than the width of this aperture 12 is projected and scanned on the aperture 12 to form the light reflecting groove 13. More specifically, the part near the aperture 12 of the laser reflecting film 11 which is a work is locally heated by this laser projection to a high temp. and the optical substrate 10 is selectively etched by the etching soln. having the thermal reactivity, by which the light reflecting groove 13 is formed at the point of the aperture 12. The light reflecting groove having the smooth side faces is thereby formed and the loss of light is decreased. |
