摘要 |
PURPOSE:To improve the durable lubricity and corrosion resistance of a high- density recording medium by providing inorg. protective layers which consist essentially of carbon and have 50Angstrom -500Angstrom thickness on magnetic metallic layers on a flexible nonmagnetic substrate. CONSTITUTION:A stage for forming the magnetic metallic layers 4, 5 by physical vapor deposition on the flexible nonmagnetic substrate 1 and a stage for forming the inorg. protective layers 6, 7 which consist essentially of carbon and have 50Angstrom -500Angstrom thickness by physical vapor deposition on the magnetic metallic layers 4, 5 are successively and continuously executed. Film formability is poor and lubricity is not obtd.; in addition, adhesive strength is insufficient if the thickness of the protective layers 6, 7 is below 50Angstrom . A spacing loss increases if the thickness exceeds 500Angstrom . The sufficient lubricity, durability and corrosion resistance are thereby imparted to the magnetic layers.
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