| 摘要 |
PURPOSE:To obtain spherical AlN powder having an uniform particles diameter, by heating a mixture of a metallic Al powder, an F containing ammonium compound, an AlN powder and a specific fluoride in a gaseous nitriding atmo sphere. CONSTITUTION:One or more of a 0.5-12.0wt.% fluoride of alkaline earth metal selected from Ca, Ba, and Sr (e.g., CaF2) is added in the mixture of metallic Al powder, F-containing ammonium compound (e.g., ammonium hydrogen fluo ride) and AlN powder, the above-mentioned mixture is maintained in the nitriding atmosphere at 300-1,300 deg.C for a specified period of time, and the nitriding reaction is completed by heating the mixture at 900-1,300 deg.C.
|
