| 摘要 |
PURPOSE:To make positioning possible easily, accurately and in a short time, by arranging an image fibre facing a toss pin, on the center line of a vacuum chuck to attract a chip, and monitoring an image from the image fibre by a monitoring means. CONSTITUTION:When an image fibre 15 receives a reflected light from a toss pin 21, an image of a toss pin 21 is displayed. Seeing the picture of the monitoring means, a worker operates the relative transferring of the toss pin 21 or a vacuum chuck 10 in the manner in which the tip of a pushing part 23 of the toss pin 21 is situated in the center. When the tip of the pushing part 23 of the toss pin 21 is situated at the center, the center line of the vacuum chuck 10 and that of the toss pin 21 coincide with each other. Thus the positioning is finished. Thereby, the positioning is enabled easily, surely and in a short time.
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