| 摘要 |
PURPOSE:To prevent a fault caused by the peeling defect of a mask from occurring by cutting some of corners of a rectangular, square, or triangular original image mask. CONSTITUTION:The rectangular original image pattern is formed like a pattern 2 whose parts 1 and 3-5 are cut. The square original image pattern is formed like a pattern 7 whose parts 6 and 8-10 are cut. Then, the triangular original image pattern is formed like a pattern 12 whose parts 11 and 13-16 are cut. In this case, two parts are cut at the left and right lower corners to remove acute parts. Consequently, the original image pattern becomes hard to peel and a pattern which has a little fault occurrence due to a mask defect is formed. |
