| 摘要 |
<p>PURPOSE:To obtain the title ultrapure air by passing previously purified air through ultrapure water, cooling the air transiently to >=-10 deg.C, and then heating the air to >=-10 deg.C. CONSTITUTION:The air sucked from an air compressor 5 is passed through an adsorptive tank filter, and the fine particles of >=0.3mu size in the air are removed by an air filter 6. The clean air is then supplied to an adsorption tank 7, and ultrapure water is sprinkled into the air. The ultrapure water is circulated to a pure water tank, and purified by an ultrapure water device 4 into the ultrapure water having >=15mOMEGA.cm electric resistance, which is sprinkled. The trace amts. of the active gases such as ammonia, gaseous carbon dioxide, and gaseous sulfur dioxide in the air are removed in the tank 7. The air is then cooled by a cooler 9 to -20 deg.C to remove the moisture in the air, subsequently supplied to an air heater 10, and heated therein to 45 deg.C to obtain ultrapure air.</p> |
