| 摘要 |
PURPOSE:To realize miniaturization, and improve reliability, by shortening the time of field oxidation, and preventing a channel-stopper layer from permeating in the horizontal direction. CONSTITUTION:By shortening the oxidizing time to form a field oxide film 7, the permeation of a channel-stopper layer 6 in the horizontal direction is reduced, and the break down voltage of a diffusion layer is made high. An insulating film 9 is formed at the center of a region for forming a field oxide film 7, which is made thick. As the field oxide film 7 can be formed rather thinly, the bird's beak can be reduced. Thereby, the element isolation of high dielectric strength capable of miniaturization is enabled.
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