| 摘要 |
PURPOSE:To obtain a perpendicular magnetic recording medium having superior high density recording characteristics by traveling a polymer film along the circumferential surface of a cylindrical can under heating, dehydrating the film, cleaning the surface of the film and vapor-depositing first and second thin metallic films on the cleaned surface. CONSTITUTION:A polyimide type polymer film 16 drawn out of a feed roll 15 is traveled along the circumferential surface of a cylindrical can 20. A vacuum region is divided into a dehydration region 31, a surface cleaning region 32 and a vapor deposition region 33 with differential pressure plates 28, 29, 30. The film 16 is dehydrated in the region 31, the surface of the film 16 is cleaned by glow discharge with a glow discharger 34 in the region 32 and an underlayer of a metal such as Ti is vapor- deposited on the cleaned surface with an evaporating source 21 in the region 33. A magnetic CoCr layer is further vapor-deposited on the underlayer with an evaporating source 22. During the vapor deposition of the layers, voltage is impressed on a free roll 23 at the outlet of the can 20 to electrostatically attract the polymer film 16 to the circumferential surface of the can 20. Thus, the creasing of the film 16 in the region 33 is prevented and a magnetic recording medium having superior surface properties is produced.
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