| 摘要 |
PURPOSE:To stably form a highly oriented film or an org. material by providing a Knudsen cell, light projecting device, high-voltage impressing device and substrate temp. controller to a vacuum apparatus which evaporates or sublimates an org. compd. and deposits the same on a substrate. CONSTITUTION:For example, 2-methyl-4-nitroaniline (MNA) 13 as the org. compd. is put into the Knudsen cell 15 in a vacuum chamber 10 and the inside of the chamber 10 is evacuated to a vacuum. The cell 5 is controlled by the temp. controller 16 to a specified temp. to evaporate the MNA to the state of a molecular beam which is then deposited on the surface of the substrate 11 on a substrate holder 12 controlled in temp. by a temp. control part 14. Light of an ultra-high voltage mercury lamp is introduced simultaneously through an optical window 18 for photoirradiation into the chamber to excite the MNA molecules under evaporation or after deposition; furthermore, a high voltage is impressed to the substrate 11 by a high-voltage electric wire 20 and terminal 21, by which the highly oriented thin film of the MNA, etc., as the org. compd. is stably formed.
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