发明名称 MOLECULAR TURBOPUMP
摘要 PURPOSE:To improve lubricity by installing a spiral groove bearing part which consists of a spherical surface body and a recessed receiving surface body in the upper part of a rotary body and has a dynamic pressure generating groove a least on one of the opposed sliding surfaces. CONSTITUTION:A spiral groove bearing part which consists of a spherical surface body 17 in the center upper part of a rotor 3 and a recessed receiving surface body 18 for fitting the spherical surface body 17 and has a dynamic pressure generating groove at least on one among the opposed sliding surfaces is installed as a means for restraining the floating-up quantity of a rotary body. Therefore, the local solid contact is prevented, and the heat generation phenomenon is prevented even if the lubricant such as oil and grease is used.
申请公布号 JPS63255593(A) 申请公布日期 1988.10.21
申请号 JP19870088732 申请日期 1987.04.13
申请人 EBARA CORP 发明人 MIZOBUCHI SHOTARO;HARADA HIDEOMI;OSADA NORIYUKI;KANAMORI TOSHIYA
分类号 F04D19/04 主分类号 F04D19/04
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