发明名称 MOLECULAR TURBOPUMP
摘要 PURPOSE:To improve the lubricity by installing a small sphere between a thrust receiving plate on a motor side and a base member and forming a dynamic pressure generating groove on the thrust receiving plate. CONSTITUTION:A thrust receiving plate 7 having a spiral groove 6, base member 8 which is installed onto a motor shaft 5 and opposed to the thrust receiving plate 7, and a small sphere 9 set therebetween are provided. The thrust receiving plate 7 and the base member 8 opposed to the thrust receiving plate 7 form a recessed part 10 at the center, and the superior revolution can be achieved by the small sphere 9 set in the recessed part 10. Therefore, the local solid contact is prevented, and the heat generation phenomenon can be suppressed even if the lubricant such as oil and grease is used, and the generation of decomposition gas of lubricant can be suppressed.
申请公布号 JPS63255595(A) 申请公布日期 1988.10.21
申请号 JP19870088734 申请日期 1987.04.13
申请人 EBARA CORP 发明人 MIZOBUCHI SHOTARO;HARADA HIDEOMI;OSADA NORIYUKI;KANAMORI TOSHIYA
分类号 F04D19/04 主分类号 F04D19/04
代理机构 代理人
主权项
地址