发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To satisfy electrical characteristics such as electro-migration resistance, working speed, etc., simultaneously by forming metallic wirings by metallic materials having materials partially different in response to electrical characteristics such as electro-migration resistance, working speed, etc. CONSTITUTION:An insulating film 3 is shaped onto the surface of a semiconduc tor substrate 1 to which an element region 2 is formed through a diffusion, etc. An insulating film 3 in an electrode section for the element region 2 on the insulating film 3 is bored, and a metallic wiring 4a connected to an electrode for the element region 2 and a metallic wiring 4b being connected to the metal lic wiring 4a and having a different material are shaped. The materials of these metallic wirings 4a, 4b are determined by electrical characteristics such as electro-migration resistance, working speed, etc. Since currents concentrate to the metallic wiring 4b in the periphery of a bonding section 41 bonded and connected to a section such as an external terminal, the metallic wiring 4b is formed by a metallic material, which differs from the material Al of the metallic wiring 4a in another section and electro-migration resistance of which is increased by adding Cu, Ni, Cr, Mg, etc. to into Al.
申请公布号 JPS63253644(A) 申请公布日期 1988.10.20
申请号 JP19870088011 申请日期 1987.04.10
申请人 NEC CORP 发明人 YANAGIYA MASANOBU
分类号 H01L21/3205;H01L23/52 主分类号 H01L21/3205
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