| 摘要 |
PURPOSE:To prevent a contact with an optical component when the optical component is exchanged, and to eliminate the need for a special clean room and the adjustment of an alignment base by fixing a holder fastening the optical component to the alignment base. CONSTITUTION:An optional component 4 is clamped and fixed to a holder 3 by screws 7 and 8 by an O-ring 5 and a mirror base 6. Consequently, when the optical component 4 is exchanged on adjustment, it can easily be exchanged even at an actual site when it is replaced together with the holder 3. Optical component 4 itself can be dismantled from the holder 3 and exchanged in another clean room, etc. Accordingly, the optical component can be replaced together with the holder in order to exchange the optical component, thus eliminating the need for a contact with the optical component. An alignment base is not disassembled, thus eliminating the need for readjustment. |
