| 摘要 |
PURPOSE:To permit the high speed operation and reduce the weight and dimension by sealing and connecting a valve plate and a counter plate by a metal bellows and introducing the compressed air into the sealed space. CONSTITUTION:A valve body 2 is constituted of a valve plate 11, counter plate 12, and a metal belows 13 prepared by sealing and connecting the both plates 11 and 12, and the compressed air can be supplied into a sealed space 16 formed by the both plates 11 and 12 and the metal bellows 13 through the air passage 70 of a rod 7. Therefore, the opening/closing operation of the valve body 12 can be carried out in sliding-free state by discharging the compressed air from the sealed space 16, and the opening/closing speed can be increased, and the weight and dimension can be reduced.
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