| 摘要 |
PURPOSE:To easily take a measurement in a short time by moving a sensor at a 1st speed and then at a 2nd speed slower than the 1st speed, and shortening its distance to a body to be measured until a measurable range. CONSTITUTION:The body 1 to be measured is set at a specific position and a measurement start target position on the body 1 to be measured and a position Pn-1 which is distant enough not to cause the sensor 2 collide against the body 1 to be measured in the direction perpendicular to the measurement start target position Pn are taught in a storage device 7. A target position arithmetic part 61 outputs a signal for moving the sensor 2 from the position Pn-1 to an intermediate position P'n at the 1st speed to an approach start movement part 62. The sensor 2 after being moved to the position P'n is moved from the position P'n to the position Pn at the speed slower than the 1st speed.
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