STRESS-COMPENSATED QUARTZ RESONATORS

摘要

A stress compensated thickness-shear resonator is of an orientation (yxwl) phi / theta selected from loci of stress compensated orientations provided for both the fast and slow thickness-shear modes of vibration. A stress compensated orientation is used in an oscillator for stable frequency-stress behavior. A stress compensated orientation having large-valued temperature coefficients of frequency is used in a temperature sensor for precision measurements. A stress and temperature compensated orientation is used in a pressure sensor such that the temperature compensated thickness-shear mode is used for pressure measurement while the stress compensated thickness-shear mode is used to compensate for effects of temperature.