THIN FILM HEATING ELEMENT

摘要

A thin-film heating element is formed of a temperature-stable, electrically insulating substrate having a thin, electrically conductive metal oxide film which is doped with foreign atoms which compensate each other in pairs and which each consist of at least one acceptor-forming element and one donor-forming element the metal oxide film being provided with connecting electrodes; the metal oxide film being doped with maximally 10% of each of the foreign atoms compensating each other in pairs, the quantity of the atoms differing maximally 10%.