| 摘要 |
PURPOSE:To join a chip correctly on a plane to be mounted with the chip and improve the reliability of its product by detecting inclination of the chip through the detection of a position attracting the chip and by correcting the position of the chip by applying a voltage to a piezoelectric element. CONSTITUTION:When substances attracted 18 such as a chip and others are attracted to a collet 1, a contacting position of the substances attracted 18 at inner wall face 2 is detected by a sensor of a resistor 10 and the like which are mounted at the inner wall face 2 of the collet 1. Signals regarding the contacting position are inputted in a controlling part and a voltage corresponding to the extent of an inclination of the substances attracted 18 is impressed to a piezoelectric element 14 supporting the collet 1. The piezoelectric element 14 is expanded and contracted by an impressed voltage and corrected so that the surface of the substances attracted 18 may be parallel to a plane to be mounted by the chip where the substances attracted 18 are joined. Thus, the substances attracted 18 such as the chip and the like are correctly joined to the plane to be mounted by the chip and the reliability for the product is improved. |
