| 摘要 |
PURPOSE:To obtain a magnetic film having high saturation magnetization while maintaining characteristic values by projecting ions of a small ion current density to the side where the incident angle of vapor is large and projecting the ions of a small ion current density to the side where the incident angle is small. CONSTITUTION:Iron or ferromagnetic material essentially consisting of iron is deposited by evaporation on a substrate 21. Ion sources 28, 29 which project the ions of a gaseous mixture contg. gaseous nitrogen and gaseous oxygen are provided to project the ions onto the substrate 21 to which the vapor (a) of the ferromagnetic material is projected. The ions of the small ion current density are projected to the side where the incident angle of the vapor (a) is large among the parts where the vapor (a) of the ferromagnetic material is projected onto the substrate 21. The ions of the large ion current density are produced to the side where the incident angle is small. The magnetic film of a high density is, therefore, stably formed without being affected by the various incident angles in the specified process for film formation. The magnetic film having the excellent magnetic characteristics and particularly large value of saturation magnetization is thereby obtd.
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