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发明名称
VERFAHREN ZUR AUTOMATISCHEN HERSTELLUNG DUENNER SCHICHTEN IM VAKUUM
摘要
申请公布号
DD261176(A1)
申请公布日期
1988.10.19
申请号
DD19870299232
申请日期
1987.01.13
申请人
VEB HOCHVAKUUM DRESDEN,DD
发明人
EHRLICH,ULRIKE,DD;GERLACH,GOTTFRIED,DD;FISCHER,DIETMAR,DD;KRUEGER,THOMAS,DD;EHRIG,KLAUS,DD;SOLGER,NORBERT,DD
分类号
C23C14/54;(IPC1-7):C23C14/54
主分类号
C23C14/54
代理机构
代理人
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地址
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