| 摘要 |
<p>PURPOSE:To eliminate dust which deteriorates the yield of processed objects by a method wherein a boat fitting stage can slide along the direction of the arrangement of the processed objects and a slipping phenomenon is eliminated from the abutting plane between a boat and the boat fitting stage. CONSTITUTION:When a positioning force is applied to a boat 1, the boat 1 is moved to the direction of the force. As a relatively large friction force is produced between the boat 1 and a quartz glass plate 21, slippage is not created between them and a sliding movable part 24 slides and moves against the actuation force of a tension coil spring 25 to position the boat 1. With this constitution, as the slippage is not created between the quartz glasses when the boat 1 is positioned, dust which deteriorate the yield of wafers 2 is eliminated.</p> |
