| 摘要 |
PURPOSE:To permit efficient and stable film formation by allowing the electron beam shot from an electron gun to be guided by a guiding means so that said beam is projected to an evaporation source. CONSTITUTION:A cylindrical can 12 to be run along a nonmagnetic substrate 11, the evaporation source 16 which is disposed in the position deviated in the projection route of vapor (a) from the central axis O of the can 12 and consists of a ferromagnetic material, the electron gun 17 which projects the electron beam (b) to the evaporation source 16 and an activating gas generating source 18 which projects an activating reactive gas to the part of the substrate 11 to be projected with the vapor (a) are provided in a vacuum vessel 21. The electron gun 17 is disposed alongside the evaporation source 16 deviated from the evaporation route of the vapor (a) from the source 16 to the substrate 11. The guiding means 19 which guides the electron beam (b) to the source 16 is disposed between the electron gun 17 and the source 16. The stable projection of the electron beam (b), the vapor (a) and the activating gas is thereby permit ted and the medium having the stable quality is efficiently formed.
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