METHODS FOR FORMING CLOSELY SPACED OPENINGS AND FOR MAKING CONTACTS TO SEMICONDUCTOR DEVICE SURFACES,申请号EP19840113321-传众专利搜索

发明名称	METHODS FOR FORMING CLOSELY SPACED OPENINGS AND FOR MAKING CONTACTS TO SEMICONDUCTOR DEVICE SURFACES
摘要
申请公布号	EP0144762(B1)	申请公布日期	1988.10.19
申请号	EP19840113321	申请日期	1984.11.06
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	OGURA, SEIKI;RISEMAN, JACOB;ROVEDO, NIVO;SHEPARD, JOSEPH FRANCIS
分类号	H01L21/8222;H01L21/28;H01L21/331;H01L21/336;H01L27/06;H01L27/082;H01L29/73;(IPC1-7):H01L21/28;H01L21/60	主分类号	H01L21/8222
代理机构		代理人
主权项
地址