| 摘要 |
PURPOSE:To obtain a magnetic film having higher saturation magnetization while maintaining characteristic values by projecting the excited molecules of a gaseous mixture near to the max. incident angle and projecting the ions of the gaseous mixture near to the min. incident angle. CONSTITUTION:Iron or ferromagnetic material essentially consisting of iron is deposited by evaporation on a substrate 21. An excitation seed source 28 which projects the excited molecules of the gaseous mixture contg. gaseous nitrogen and gaseous oxygen, i.e., excitation seeds and an ion source 29 which projects the ions of the gaseous mixture are provided. The excitation seed of the gaseous mixture is projected near to the max. incident angle among the incident angles at which the ferromagnetic substrate is projected onto the substrate 21. The ions of the gaseous mixture is projected from the ion source 29 near to the min. incident angle. Then, the ions of the energy higher than the energy of the excitation source are eventually projected near the min. incident angle and the magnetic film of a high density is stably formed without being affected by the various incident angles in the specified process of the film formation. The magnetic film having the excellent magnetic characteristics and particularly large value of saturation magnetization is thereby obtd.
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