Twin film strain gauge system

摘要

A strain gauge sensor for providing an electrical output responsive to a parameter applied to a substrate. A homogenous thin film circuit is deposited on an insulating layer which is deposited on a substrate of single-crystal material. The thin film circuit includes a strain gauge responsive to strain transferred through the insulating layer from the substrate and resistance trimming networks trimmed by removal of thin film material from the trimming networks to adjust zero and gain. A diaphragm is etched in the substrate to form a pressure sensor. An optional support layer may be added to the sensor for mounting the sensor to a surface.