| 摘要 |
PURPOSE:To quickly and highly accurately execute a correction operation to position each prescribed region during a plate-making process according to a global alignment system by a method wherein a distance between marks formed on a plane object according to a previously designed value is measured accurately prior to a stepping shift operation and this measured result is compared with the designed value of the distance between said marks and is operated. CONSTITUTION:After a large-sized substrate 1 has been aligned by using marks 3 for global alignment use, a plate-making operation in a prescribed region of the large- sized substrate 1 is executed during a stepping shift operation. During this process, a distance between marks 2 for distance measurement use in the longitudinal direction and in the transverse direction is measured accurately by using, e.g., a laser interferometer or the like prior to the stepping shift operation (process S1). Then, said measured value is compared with a designed value of the distance between the marks 2 and is operated; the expansion of the large-sized substrate 1 is calculated; an appropriate amount to be corrected for positioning said prescribed region is calculated (process S2). A correction is executed during the stepping shift operation on the basis of said amount to be corrected (process S3). Afterward, said processes S1-S3 are repeated at each stepping shift operation. |
