| 摘要 |
PURPOSE:To make it possible to issue an alarm in case a probe card is overdriven by incorporating piezoelectric elements between the probes of the probe card having numerous probes fixed on a board and the board. CONSTITUTION:Each one end part of probes 3 is mounted on a printed wiring board 1 with a solder 6, the other end parts of the probes 3 are protruded through an opening part 2, piezoelectric elements 7 are inserted between the probes 3 and the board 1 and the probes 3 are pressed to the side of the board 1 by a fixed ring 8. A wafer is placed on a wafer stage, a probe card is gradually lowered and when the other end parts (the points) of the probes 3 come into contact to the bonding pads of the wafer, force is applied to the elements 7 and a voltage is generated from the elements 7. Thereby, a warning sound to excessive probe pressure can be made to issue by a warning sound unit provided in an inspection machine or a stopper for preventing overdrive can be made to operate.
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