| 摘要 |
PURPOSE:To efficiently produce spherical metal powder of a uniform shape by introducing powder of a high m.p. metal or an alloy thereof into composite plasma consisting of DC arc plasma and high frequency plasma in an inert gaseous atmosphere. CONSTITUTION:Powder of a high m.p. metal such as W, Ta or Mo, or an alloy thereof is introduced into composite plasma consisting of DC arc plasma and high frequency plasma with an inert gas such as Ar as a carrier gas. When the high frequency plasma is ignited, the DC arc plasma is used as seed fire for ignition and both the plasmas are maintained and used in combination after the ignition in the form of stable and easily controllable high frequency plasma stabilized by DC arc plasma. Since the powder as starting material is surely passed through the high temp. region of the high frequency plasma, uniform spherical powder contg. no unspherical powder can be efficiently produced..
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