发明名称 |
Electron beam line evaporator |
摘要 |
An electron beam line evaporator for coating heat-sensitive strips or substrates includes a magnetic trap overlying an evaporation crucible to prevent unpermissible heating and static electrification by back-scattered electrons, complemented with means to influence the injection angle of a dynamically deflected electron beam in such a manner that the beam enters the horizontal magnetic field of the trap at the same angle in each deflection phase independent of stray fields. Such means are arranged inside a gap of a pole shoe necessary for the horizontal magnetic field used by the trap and are operative to generate a vertical magnetic field variable in time and locally alongside the pole shoe.
|
申请公布号 |
US4778974(A) |
申请公布日期 |
1988.10.18 |
申请号 |
US19870037662 |
申请日期 |
1987.04.13 |
申请人 |
BAKISH MATERIALS CORPORATION |
发明人 |
NEUMANN, MANFRED;SCHILLER, SIEGFRIED;MORGNER, HENRY;UNGANZ, PETER |
分类号 |
H01J37/147;H01J37/305;(IPC1-7):B23K15/00 |
主分类号 |
H01J37/147 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|