Electron beam integrated circuit tester

摘要

An electric beam integrated circuit tester including a source of primary electrons, a support for the integrated circuit, and an electronic column fixed above the support for the integrated circuit for focusing the primary electron beam emitted at the surface of the circuit on the points of the circuit to be tested. It also includes an accelerator of the secondary electrons emitted by the integrated circuit in a direction colinear and opposite that of the primary electron beam, a separator with three pole pieces for directing out of the column the beam of secondary electrons accelerated by the accelerator and an energy spectrometer coupled to the separator and fixed to the outside of the column for analyzing, depending on their energy, the electrons of the beam of secondary electrons emitted separately by the separator.