| 摘要 |
PURPOSE:To permit dealing with fine patterns and to provide excellent mass productivity with a simple apparatus for production by coating a metal alkoxide or the hydrolyzed liquid thereof or high-polymer material such as polyurethane on a substrate and forming a thin film thereon. CONSTITUTION:A grating matrix 2 consisting of projecting or recessed molds of a photoresist at pitch intervals LAMBDA is formed on the substrate 1. The matrix 2 is then placed on the bottom of a vessel 3 and a sol 4 is poured therein. The sol 4 is geled by using means such as heating or pH adjustment to obtain a gel 5. The gel is dried and sintered to remove moisture and org. component. Then, the gel 5 shrinks isotropically and the mold 6 is obtd. A liquid 8 which can be a light guide is then coated on the substrate 7. The mold 6 is pressed to the liquid 8 to transfer the mold before the plasticity of the liquid 8 is not lost after the coating. The liquid 8 is thereafter subjected to a treatment such as sintering or baking in order to form the liquid 8 into the light guide, by which the light guide element is finally obtd. |
