发明名称 |
Photolithographic mask repair system |
摘要 |
A method and device are provided to accomplish laser driven pyrolytic, photolytic and photoactivativation process requiring controlled atmosphere without the use of gas tight cells. A method and device are provided to correct clear faults on a photo-lithographic mask by metallic deposition on the mask at standard temperature and pressure. The deposition is formed by the pyrolytic decomposition of an organometallic gas mixture which may include chromium and molybdenum hexacarbonyls, and a buffer gas. The decomposition is done utilizing a laser beam. The device may be incorporated into a system which has other members used to correct opaque faults in the same mask.
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申请公布号 |
US4778693(A) |
申请公布日期 |
1988.10.18 |
申请号 |
US19860919975 |
申请日期 |
1986.10.17 |
申请人 |
QUANTRONIX CORPORATION |
发明人 |
DROZDOWICZ, ZBIGNIEW;STONE, HARVEY;VOGLER, JOHN |
分类号 |
B23K26/14;C23C16/04;C23C16/48;G03F1/00;H05K3/14;H05K3/22;(IPC1-7):B05D3/06;B32B35/00;B23K9/00 |
主分类号 |
B23K26/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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